Crystal growth of BiSrCaCuo thin films on submicron-sized step structures

Abstract

In order to fabricate intrinsic Josephson junctions (IJJs) on a submicron-scale, crystal growth of Bi 2Sr 2CaCu 2O x (BiSrCaCuO) at step edge structures has been investigated. In this paper, we report on a crystal growth of BiSrCaCuO at step edges structures fabricated on SrTiO 3 substrates. Line patterns with a line width of 0.3 μm are prepared at a lower part of the step edge structures along [1 1 0] and [1 0 0] azimuth of SrTiO 3. The BiSrCaCuO crystals have successfully been grown on the step edge structures. The step edge structures consist of a stack of plate-shaped crystals surrounded by (0 0 1), (1 1 0), (0 1 0) and (1 0 0) facets. A 0.7-μm-wide bridge structure of BiSrCaCuO fabricated by the same technique shows a superconductivity and has a critical current density of 4.8×10 6 A/cm 2 at 37 K. These results indicate that this technique is promising for device fabrications in submicron- or nano-scale.