Cr cluster deposition by plasma—gas-condensation method

Abstract

Transmission electron microscopy observation was carried out for nanometric Cr clusters deposited on microgrids at room temperature using plasma–gas-condensation (PGC) method. In order to obtain optimum conditions for monodisperse cluster formation we have studied effects of an Ar gas pressure, an Ar gas flow rate, and a mixing rate of He gas with Ar gas on the size distribution of formed clusters. It has been found that monodisperse clusters with the size rage of 9–13 nm in diameter are producible at a low Ar gas pressure (≤1.3 Torr) and a low Ar gas flow rate (≤600 sccm). The mean cluster size decreases with decreasing Ar gas pressure, while it is not sensitive to the Ar gas flow rate. When He gas is mixed with Ar gas, the mean cluster size further decreases to 6 nm and the cluster beam intensity becomes stronger probably because He gas with the high thermal conductivity enhances supersaturation for cluster nucleation.