Abstract
The electron cyclotron resonance (ECR) hydrogen plasma with substrate dc biasing was investigated by using a Langmuir probe and optical emission spectroscopy during the formation of nanotips from as-grown diamond films. It is found that the coupling effect between the substrate biasing and the bulk plasma plays an important role in the fluxes of active species incident on the substrate. The energy of incident hydrogen ions is determined by the substrate biasing, while the densities of incident hydrogen ions and atoms are adjusted jointly by the substrate biasing and the bulk plasma. Diamond nanotips were fabricated from as-grown films under ECR-dc conditions. The shapes and sizes of the nanotips vary with the processing parameters, which are correlated with the change of active species on the film surface due to the coupling effect.
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