Abstract
Hall effect and resistivity measurements of zinc‐diffused and cadmium‐diffused are compared with chemical determinations of the diffusant concentration in the samples. The form of the diffusion profile in the diffused layer was varied from near linear through a complementary error function profile to a discontinuous‐type concentration‐dependent diffusant distribution. The results show that, unlike sheet resistance‐type measurements, Hall effect measurements are a reliable means of directly determining the average diffusant concentration regardless of the form of the penetration profile or the variation of mobility in the diffused layer. Free carrier concentrations calculated from Hall effect measurements were accurate within ±20% of the chemically determined diffusant concentration over a range of acceptor concentrations from greater than .
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