Abstract
This study proposes the control method of the 1st- and 2nd-order temperature coefficients of two-layer substrate composed of ZnO and Ta2O5 thin films which have the 2nd-order temperature coefficients of delay time with the signs opposite to each other. As a result, a stable SAW substrate of [Ta2O5/ZnO/Fused quartz] showing the 3rd-order characteristics was developed.
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