Abstract
Crystallized Ta2O5 thin film have been deposited on fused quartz substrate by reactive dc diode sputtering. Crystalline structure and piezoelectric properties of the Ta2O5 thin film were investigated. Surface acoustic wave (SAW) properties, including a phase velocity, a coupling coefficient, a temperature coefficient of delay, and a propagation loss, were measured for SAW propagating in the Ta2O5 thin film on fused quartz substrate. The coupling coefficient K2 is 0.7% for hk=1.6. The first-order temperature coefficient of delay time is zero for hk=1.78.
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