Abstract
A possibility of distinguishing information on defects of a substrate and of a periodical microstructure upon their visualization for a composite diffraction element is substantiated. It has been shown for the first time that, for such a diffraction element, it is possible to distinguish separately reflections from macroscopic defects of the substrate and from the diffraction microstructure itself in the interference patterns, using a two-beam interferometer complemented by an optical system of spatial filtration.
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