Abstract
Specific features of the implementation of a method for individual monitoring of the quality of components of thin composite diffraction elements with a 1D periodic structure are considered. Several optical schemes for visualization of defects of single components are proposed and analyzed. A composite diffraction element that represents a set of optical components (thin transparent plate with curved surfaces and 1D periodic microstructure) is used as an example to demonstrate a possibility of separate visualization of the defects of substrate and periodic structure. Interference patterns that characterize the quality of the thin substrate and periodic structure of the composite element are presented. The periodic structure represents an amplitude grating that is recorded in a thin photosensitive layer located between two glass substrates.
Published Version
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