Abstract
We report on the development of a process chain for the conformal surface-structuring at sub-microscale of complex parts. More especially, the main objective was to manufacture functional LIGA microparts with engineered sidewall topographies. Conventional clean room processes were combined with nanosphere lithography to produce surface-structures with controlled length-scales. A key enabler was the nanosphere deposition process which was characterized using QCM monitoring and optimized on flat surfaces. It was successfully applied to SU8 molds to produce structured nickel phosphorus LIGA parts. The structured surfaces produced were also used to create Liquid Infused Surfaces (LIS), having very low wetting hysteresis.© 2017 Elsevier Inc. All rights reserved.
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