Condition and Effects of Various Plasmas after Passing through the Slits

Abstract

The conditions and effects of various plasmas after passing through narrow slits have been investigated. It is important to know them in order to improve solid materials of complex structure. We have studied them, using a sample which simply represents the complex solid materials. This sample consists of slit plates, spacers and a base plate. Modification sources, which modify the material, were introduced into the sample through the slit plates. The conditions and effects of various plasmas were estimated by measuring the change between the contact angles before the plasma improvement and those after the plasma improvement. The material was treated in oxygen plasma, argon plasma and nitrogen plasma mainly. These kinds of plasma were generated by a discharge reactor of induction (coil) type. It has been found that these plasma gases can pass through a very complex route with twists and turns and treat a part behind the material. However, the processing effect is different with every plasma. Oxygen plasma’s effect was the strongest of the gases that we used. Argon plasma’s effect was not very strong in the condition of our experiment. In case of nitrogen plasma, its effect became low rapidly near the slits.