Behavior and effect of plasma after passing through the slit.

Abstract

The behavior and effect of plasma during and after passing through narrow slits have been investigated. It is important to know them in case of improving a material that has three-dimensional complex structure. We have studied them by using the sample which simply represents the three-dimensional complex material. This sample consists of slit plates, spacers and a base plate. The modification sources, which modify the material, were introduced into the sample through these slit plates. The behavior and effect of the plasma were estimated by measuring the change between the contact angle before the plasma improvement and that after the plasma improvement. We treated the material in oxygen plasma mainly. This plasma was generated by a discharge reactor of induction (coil) type. It has been found that this plasma can go on along a very complex route with twists and turns and treat the part behind the material. We have found that this plasma can pass through the narrow slit, and that the selected plasma, which has the designated characteristics, can be made by using plates with slits of various shapes.