Abstract
AbstractThis paper describes a computer algorithm to self‐consistently determine exposure correction for the proximity effect which has been recognized to be indispensable in electron‐beam exposure. The usefulness of this method is demonstrated by computer simulation. The previously proposed successive determination of proximity effect correction is not self‐consistent. However, the present method is not only self‐consistent, but also capable of maintaining pattern symmetry. Coupled equations for irradiation intensities to be directed to various figures must be solved. These equations are over‐determined in many cases, and therefore, the least‐square solution with the minimum norm is employed. Since the solution has to be discretized with upper and lower bounds, the problem constitutes a quadratic programming. A modified successive overrelaxation (SOR) method is used to consider the large sparse matrices.
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