Year-end Sale % OFF 
Abstract
We examined the composition and orientation dependences of the piezoelectric properties by combinatorial sputtering. PbTiO3 and PbZrO3 were simultaneously sputtered to prepare composition gradient Pb(Zr,Ti)O3 (PZT) films on Pt/Ti/Si substrates, and an almost linear composition gradient was observed in a range of Zr/(Zr+Ti) ratios from 0.33 to 0.76. Dielectric and piezoelectric properties attained maximum at the Zr/Ti composition close to the morphotropic phase boundary (MPB), which is consistent with that of PZT ceramics. 100-oriented PZT films showed a higher dielectric constant than the PZT films with the other orientations, while the PZT films with 111 + 100 mixed orientation showed larger values of e31f. These results suggest that the a-axis orientation is dominant in the 100-oriented PZT films. In this study, we demonstrated that the combinatorial sputtering method enables the precise evaluation of the composition dependence of piezoelectric and dielectric properties.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
