Abstract
Ultrafine amorphous Si/C/N ternary powders have been prepared in a CO2 laser assisted process. We demonstrate the possibility to drive the C/N ratio in the powder by properly choosing the experimental conditions and the gaseous reactant ratio in the initial mixture containing silane, dimethylamine, and ammonia. A kinetic model that accounts for reaching the equilibrium between the gaseous reaction intermediates and the solid products is proposed.
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