Abstract
Laser induced gas phase reactions have been used to produce highly controlled powder and thin film reaction products. Powders of Si, Si3N4 and SiC exhibit presumed ideal characteristics for consolidation into dense ceramic parts. Individual powder characteristics can be manipulated with this process while being highly efficient in terms of materials utilization and energy consumption. The CVD process permits physical, electronic and crystallographic properties to be controlled. Resulting amorphous Si films exhibit superior properties.
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