Abstract
Ultrafine silicon powders with a mean particle diameter of 20–200 nm and a mean crystallite diameter of 18–37 nm were synthesized from high purity SiH4 by laser induced gas phase reactions. The Si powders have been characterized by TEM, XPS, FTIR, XRD and BET techniques, and the effects of processing variables including SiH4 flow rate, laser power, cell pressure and the ArSiH4 ratio on the formation of the Si powders have been studied. Results showed that the powders consisted of monodispersed spherical particles, and agglomerated particles; both types of particles have polycrystalline structure, which resulted from the interparticle collision growth during the formation of the powders. The nonagglomerated spherical particles with a small size werefavored to form with a lower laser power and higher ArSiH4 ratios. The Si powders have O-Si-H surface configuration due to oxidation when exposed to air.
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