Abstract
In soft x-ray spectroscopy the region from 2 to 7 keV is the most critical, because optical gratings are considered to become inefficient and solid-state detectors exhibit a relatively low energy resolution. We investigated the performances of ion-etched blazed gratings and of silicon detectors as components for soft x-ray spectroscopy. The gratings were mounted in a Rowland geometry at angles of incidence varying from to . We used a microfocus soft x-ray as source and as the detector an uncoated channel electron multiplier sliding along the Rowland circle to scan the spectrum. We recorded several spectra between 2 and 7 keV. The spectral resolution obtained shows essentially almost slit limited line widths; the diffraction efficiency ranges from 1 to 3% at and up to 4.2% at . As a comparison, we recorded the same spectra with a Si-PIN diode, cooled at by a Peltier circuit. The diode exhibits good sensitivity and low noise; the resolution obtained is around 280 eV, almost constant at the various energies. This experiment shows that it is possible to extend the classical spectroscopic techniques to the soft x-ray region in order to obtain complementary performances with respect to solid-state detectors.
Published Version
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