Abstract
Sample preparation, essential to any analysis, remains an under-documented step. Preparation methods for transmission electron microscopy (TEM) are complex and lead to artifacts that need to be identified to avoid wrong conclusions about the sample's microstructure. Ion milling techniques are increasingly becoming the reference techniques to prepare thin foils. The possibilities of different ion beam processes for milling samples will be shown and compared, using ceramic carbon/carbide fibers, a material applied in many industrial applications, as a test specimen. This overview of ion milling preparation techniques will enable us to identify the advantages, disadvantages and parameters in order to best prepare these thin samples. It will be carried out for the community, and will also highlight a new preparation method for ceramic fibers to minimize the artefacts inherent in these techniques.
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