Abstract

The issue of lateral stress measurements, with piezoresistance gauges, is discussed by Feng et al. [J. Appl. Phys. 82, 2845 (1997)] and Feng and Gupta [J. Appl. Phys. 83, 747 (1998)] using 2D numerical simulations. The purpose of this Comment is to highlight the difficulties with these simulations and to emphasize some of the results obtained in these articles, which strongly support our analytical approach to the subject.

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