Abstract

ABSTRACTAzimuthal smoothing (AS) that enables the focal spot of a laser quad to rotate in a period of a few picoseconds can improve the illumination uniformity. However, the smoothing performance of azimuthal smoothing is worse than that of smoothing by spectral dispersion (SSD) due to the low rotation speed in the center area of the focal spot. A combined implementation of the schemes including smoothing by spectral dispersion, radial smoothing (RS) and azimuthal smoothing is discussed to achieve better and faster illumination uniformity. The theoretical models of the combined smoothing scheme have been built up to analyse the smoothing performance. The key parameters affecting the smoothing performance of the combined smoothing scheme are analysed and optimized, including the topological charge and the wavelength difference. The simulation results show that the illumination uniformity of the laser quad can be significantly improved in multi-directions by the combined smoothing scheme.

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