Abstract
Anodic oxidation of Al film on silicon substrate in three different electrolytes is investigated through j– t curves and photoluminescence (PL) of the grown porous anodic alumina (PAA) under same voltage. Their growth is analyzed with three typical stages according to j– t curve. The influence of the electrolyte on color centers is shown through comparison of the PL spectra of Si-based PAA fabricated in different electrolytes. From sulfuric, oxalic to phosphoric acids, The PL shows blueshift behavior with different electrolytes due to mechanical stress and concentration of defect centers, while the change of PL intensity reduced for decreasing of the contrast across barrier layer, which is helpful to understand PL mechanism and growth mechanism of porous anodic alumina.
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