Abstract
Abstract The properties of excited electronic states of acetylacetonate complexes of palladium and platinum, and the photochemical reactivities of the fluorinated derivatives in the gas phase are reviewed. These complexes are precursors for the thermal and photochemical production of metal films via metal organic chemical vapor deposition. This review is organized in three sections. First, the electronic structure is surveyed, the results of molecular orbital calculations are discussed, and the theoretical results are compared with the electronic spectra. Second, gas phase spectroscopy is discussed. Both electronic absorption spectra of hot gases and excitation spectra in a molecular beam have been used to assign the lowest excited states. Finally, the gas phase photochemistry is discussed. Solid photoproducts including particles and films are briefly reviewed, and photoproducts in the gas (identified by emission and time of flight mass spectroscopy) are discussed. The relevance of the gas phase photochemistry to laser assisted chemical vapor deposition is emphasized.
Published Version
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