Abstract
Chemical dissolution of GaAs, InAs, InAs (Sn), GaSb and InSb single crystals in H2O2–HBr–tartaric acid etching compositions
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https://doi.org/10.32434/0321-4095-2020-131-4-163-171
Publication Date: Jul 1, 2020 | |
Citations: 1 |
Chemical dissolution of GaAs, InAs, InAs (Sn), GaSb and InSb single crystals in H2O2–HBr–tartaric acid etching compositions
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