Abstract
The surface potential of freshly plasma-polymerized films of hexamethyldisiloxane was measured for film thicknesses ranging from about 0.1 to 1 μm. The films are found to be in an electret state under certain fabrication conditions. Experimental evidence is given which indicates that charge trapped during plasma polymerization is uniformly distributed across the sample thickness. It has been found that other electret properties such as the polarity of trapped charge, and the charge retention characteristics can also be controlled by an appropriate choice of polymerization conditions.
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