Abstract
Miniature Rectangular Coaxial Lines (RCL) fabricated on silicon substrate using standard silicon 0.18um CMOS processing technologies are achieved. Also a valid method for de-embedding test structure is proposed. The measured results show that the insertion loss of 1.7dB/mm and the return loss of 10dB at 20GHz are obtained. It is believed that the RCL with high isolation and low insertion loss will be very useful for high performance and low cost silicon-based RFIC design.
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