Abstract
MEMS acceleration sensors have been systematically analyzed across a wide temperature range between -40°C and +85°C. Failure mechanisms such as offset drift induced by thermal mismatch of different materials are well understood. However, in densely packed electronic devices (e. g., smartphones) distances between neighboring components are very small. Thus, power intensive components like microprocessors can heat up and create temperature gradients in their vicinity. In this paper we introduce a measurement system to systematically investigate the influence of temperature gradients on MEMS sensors. For precise investigation of their offset and sensitivity, the system can be rotated in the earth's gravitational field. Experimental results show that the z-axis offset is linearly dependent on out-of-plane temperature gradients whereas its sensitivity is nearly constant. The in–plane axes are not affected. Several hypothesis are still under investigation but currently a microfluidic effect caused by the temperature distribution of the gas within the sensor cavity is the most likely explanation.
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