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https://doi.org/10.1016/0038-1101(92)90055-h
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Cite Journal: Solid State Electronics |  Publication Date: Feb 1, 1992 |
 Citations: 5 |
Affiliation: Slovak Academy of Sciences
The values of specific contact resistance, measured by TLM, are often corrected with respect to non-zero sheet resistance of contact metallization. This paper presents an additional effect of the position of voltage probes on the contact area. This effect is to be considered at the determination of contact parameters.
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