Abstract

We have characterized the low frequency noise (LFN) in the NAND flash memory string, for the first time, and shown its fundamental properties. As a result, the NAND flash memory shown specific LFN characteristics in conditions such as bit-line bias, word-line bias, read current and program or erase state of each cell in a string. Also the LFN was investigated with program/erase (P/E) cycling of a cell or all cells in a string, and shown several tens mV of maximum threshold voltage fluctuation after ~100 k cycling at 70 nm node. Lastly, we have predicted the effects of the LFN in sub-70 nm NAND flash memory.

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