Characterization of iron oxide coatings prepared by MOCVD method from Fe(CO)5

Abstract

This work dedicated the study of iron oxide deposition by metalorganic chemical vapour deposition (MOCVD) in hot-walls reactor with Fe(CO)5 in Ar-O2 atmosphere under pressure about 70 Pa. Phase and structure studied by x-ray photoelectron spectroscopy (XPS) and reflection high-energy electron diffraction(RHEED). This analysis also gives information for some common factors of MOCVD decomposition of Fe(CO)5. Topology of the coatings studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM). Optical properties of the coatings studied with spectrophotometer. There was identificated that coatings which was made by MOCVD on Si 〈1 0 0〉 substrate has a cluster structure which size increase with deposition time and supposed Volmer-Weber growth mode.