Abstract
Eu-doped thin films deposited by radio-frequency (rf) magnetron sputtering have been studied for the transparent conductive phosphor layer, which is transparent in visible light, electrically conductive, and luminescent. The resistivity of the film increased as the firing temperature and Eu concentration increased. The film showed an excitation peak at 300 nm and an emission peak at 588 nm. The maximum photoluminescence and cathodoluminescence intensity was observed under conditions of 1.0 atom % Eu doping and a 1200°C firing temperature; the resistivity was and the transmittance was above 70%. The relation between the resistivity and cathodoluminescence intensity has been discussed.
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