Abstract
An inner coating system has been developed with the use of scanning coaxial electron cyclotron resonance (ECR) plasma. In this system, plasma was generated by the ECR method inside a coaxial metallic or insulated tubes under low pressure and narrow gap conditions. ECR plasma was transported along the tube axis by controlling the position of ECR points. By inserting the insulated tube into the metallic tube, discharge at low pressure was realized. We succeeded in coating titanium onto the inner surface of an insulated tube of 27 mm inner diameter and 480 mm length. Using this coating system, titanium nitride (TiN) films were deposited in the metallic tube at an Ar flow rate of 0.1 sccm, an N2 flow rate of 0.1 sccm and a total pressure of 0.14 mTorr.
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