Abstract
All-solid state lithium rechargeable thin film batteries were fabricated with the configuration of using sequential thin film techniques. Copper vanadium oxide thin films and Lipon thin films were prepared by DC reactive dual source magnetron sputtering and RF magnetron sputtering, respectively. According to XRD analysis, we found out that copper vanadium oxide thin films were amorphous. The electrochemical behaviour of them was examined in half cell system using EC : DMC(1:1 in IM ) liquid electrolyte. The ionic conductivity of Lipon thin film was at and cell showed that the discharge capacity was about beyond 500cyc1es.
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