Abstract
Carbon films prepared by plasma assisted chemical vapor deposition were doped by laser active ion Er 3+. The characterisation of the layers was performed using Rutherford backscattering spectrometry and elastic recoil detection analysis. Optical properties of the waveguides were measured at 660 nm wave length using standard prism spectroscopy. The correlation between the layer composition and the content of incorporated erbium and layer optical properties shows very interesting aspects [SPIE 4281, San Jose (2001) 13].
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