Abstract
Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA) with lithium ions are compared to using helium ions. The availability and accuracy of backscattering cross-section and stopping power data for incident Li ions are reviewed, and energy broadening contributions due to detector resolution and energy loss straggling are discussed. Theoretical calculations of the depth resolution are compared with experimental data for RBS from Nb/Co multilayers and foil-ERDA from amorphous hydrogenated carbon multilayers. In RBS about the same or better depth resolution with Li than with He is achieved, while in ERDA for the detection of hydrogen isotopes the depth resolution is increased by a factor of about 1.5 compared to incident He.
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