Abstract
Environmental pollution is a serious concern all over the world, which can cause health related issues. To curb the effect of pollutants, monitoring devices known as gas sensors are required. Chemiresistive-semiconductor metal oxide (C-SMO)-based gas sensors are widely applicable for detection of toxic gases namely NO2, CO, SO2, CO2, NH3, and H2S, etc., in high as well as low concentrations (ppm to sub-ppb). These C-SMO sensors are unique due to their incomparable properties viz., high sensitivity, long life, and ease in operation, and low cost. The characteristics of C-SMO gas sensors depend upon the materials properties, design, and fabrication process. This chapter deals with the development of C-SMO sensors from traditional to microelectromechanical system-based technology, their sensing mechanism, and working principal. The important performance parameters such as sensitivity, selectivity, stability, and sensor drift, etc., have been discussed along with the influencing factors like microstructure, vacancies, chemical composition, temperature, humidity, etc. The lab and industrial level outcomes as well as various challenges and future perspectives of C-SMO sensors are deliberated.
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