Abstract
This chapter provides an overview on the general considerations of methods for vacuum gauge calibration. Two methods, the static and the dynamic methods, have evolved for the absolute calibration of vacuum gauges. Each one provides two measurement approaches according to whether Pg and PG are related directly or by calculations based on the kinetic gas theory. Calibration according to the static method is performed either directly or indirectly by means of static expanders. In the direct method, both the gauge being calibrated and the pressure standard are attached to the calibration chamber and subjected to the required pressure points. In the indirect method, known as the expansion method, calibration consists of expanding in the calibration chamber an accurately known amount of gas contained in a small volume. The chapter describes the main components of a calibration system that can be categorized as the calibration chamber and the pumping system. It discusses static and dynamic method for calibration and some other methods for calibration in ultrahigh vacuum. The chapter discusses the measurement of gas throughput and the measurement of conductance to free molecular flow.
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