Abstract

Use of multilayer dielectric thin films provides opportunities to optimize properties for different applications. In this work, the changes in the leakage current in Ba0.8Sr0.2TiO3 thin films upon introduction of ZrO2 layers of different thicknesses are studied. Unusual changes in the leakage current and the transition field with variation in the number and thickness of the ZrO2 layers are observed. Profile of the oxygen concentration across the sample, as determined by x-ray photoelectron spectroscopy, shows that the oxygen diffusion length controls the modulation in the concentration of the charged oxygen vacancies, and hence the depletion layer thicknesses, at the interfaces. A qualitative model for the observed behavior is provided.

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