Abstract
Cr doped diamond-like carbon (DLC:Cr) film was synthesized in various flow rates of C2H2/Ar under a substrate voltage of −50V at 500°C by a filtered cathodic vacuum arc plasma. This work has found that the structure of the films was correlated to the flow rate of C2H2/Ar but the luminescence properties are similar. The cathodoluminescence spectra of DLC:Cr films obtained at 1.9–2.4eV verifies that the luminescence from the films is in the visible region. The incorporation of Cr into the carbon network results in red emission shifted to 1.99eV and the orange emission (2.03eV) also appeared due to the transitions between chromium-related electron levels and σ* states. The peak at 2.10eV may result from the defects of the structures in DLC:Cr films.
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