Abstract
Polycrystalline transition metal carbides (M=Ti, Mo) were deposited by a low-pressure chemical vapor deposition system on quartz and a metal plate. Using C2C16 and the metal plate as the precursors, the carbonization reactions occurred at a temperature exceeding 800°C. The block composition of titanium carbide is Ti/C = 0.66 and that of molybdenum carbide is Mo/C = 1.65. According to our results, the composition of thin films is a mixture of carbon and metal carbide. With respect to the volatile products, in addition to CC14, C2C14, and Cl2, we obtained TiCl4 while reacting the titanium metal with C2C16. The formation of TiCl4 implies that titanium metal acts as a reduction reagent. In addition, this compound transfers chlorine from carbon to itself to obtain TiCl, TiC12, TiCl3, and TiC14. In this reaction, TiCl2 and TiCl3, were freshly prepared and acted as the titanium source of further reaction. The total reaction pathway was studied in detail.
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