Abstract

A mobility analysis of ionized impurity scattering is performed for the calculation of the impurity concentrations of liquid-phase-epitaxial (LPE) InP layers. The donor and acceptor concentrations (Nd, Na) calculated by the method explain the temperature dependence of the Hall coefficient of InP layers in the range of carrier concentration n=2×1015-2×1016 cm-3 well. By applying the calculation to Hall data on undoped and lightly Cd-doped InP specimens with a growth temperature of 650°C, the effective distribution coefficient of Cd is determined as KCd=1.8×10-3.

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