Abstract
An apparatus for ion bombardment in the energy range of 5–20 keV is described. The ion beam, produced by a duoplasmatron ion source, is purified by a magnetic sector field and directed into a target chamber 60 cm in diameter. The chamber is evacuated by sputter ion and titanium sublimation pumps with a total pumping speed of 20000 ls −1 for H 2. The energy and angular distributions of particles backscattered from metal targets can be measured with an electrostatic spherical condenser which can be pivoted around the target. The whole apparatus is bakeable up to 250°C. With a 100 μA proton beam a pressure of 10 −9 torr is maintained in the target chamber. The black off pressure is a few 10 −11 torr.
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