Abstract
The blueshift in the photoluminescence (PL) of porous Si was observed by immersion in deionized water at room temperature for a few hours just after anodization. This treatment changed both the size of Si microcrystals and the surface chemical structure, but the PL peak wavelength was more sensitive to the change in the surface chemical structure. The primary change observed was oxidation of the surface and reduction of the SiHx species with their compositional change. From these results, it is concluded that the PL blueshift is affected by the surface structure rather than the Si microcrystal size.
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