Bias controlled electrostrictive longitudinal resonance in X-cut lithium niobate thin films resonator

C Deguet,S Ballandras,A Reinhardt,M Aïd,M Pijolat,C Billard,E Defay,D Mercier

doi:10.1063/1.3598410

Abstract

In this letter, we show that a longitudinal acoustic wave can be generated in X-cut LiNbO3 (LNO) thin films when a voltage bias is superimposed to the radio frequency signal. Although there is normally no coupling of this wave in X-cut LNO, its electrostrictive behavior combined with bias reaching 3.9 MV/cm induces an electromechanical coupling around 11%. This experiment was performed without acoustic isolation with the LNO substrate (high overtone bulk acoustic resonator configuration).

Highlights

HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not
We show that a longitudinal acoustic wave can be generated in X-cut LiNbO3 ͑LNOthin films when a voltage bias is superimposed to the radio frequency signal
Acoustic resonators based on piezoelectric substrates and thin films are nowadays extensively utilized for radio frequencyRFfilters

Summary

Introduction

HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. We show that a longitudinal acoustic wave can be generated in X-cut LiNbO3 ͑LNOthin films when a voltage bias is superimposed to the radio frequency signal.

Results

Conclusion