Abstract
The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. A nearly diffraction limited output beam is obtained from hard edge unstable resonators. An improvement of the far field energy distribution is achieved with partial reflecting hard edge outcoupling mirrors. The phase delay between the central part of the beam and the beam edge caused by these partial reflecting mirrors can be reduced by using phase unifying mirrors. Using unstable resonators a brightness of 1.4 × 10 15 W/cm 2 sr has been obtained from a long pulse XeCl excimer laser
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