Abstract

The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. For the outcoupler different reflectivity profiles are used. A near diffraction limited output beam is obtained from hard edge unstable resonators. A beam with only one central spot in the focus of a lens can be obtained with a resonator fitted with a Gaussian outcoupling mirror.

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