Abstract

The corundum structure is rhombohedral/trigonal and thus has lower symmetry than the well‐investigated hexagonal crystals such as wurtzite GaN‐ and ZnO‐based materials. By investigating the growth of α‐phase alloy thin films on various orientations of Al2O3 substrates, the anisotropy around the [00.1]‐axis is investigated. In particular, the pseudomorphic growth on the r plane (01.2) and (10.2) plane substrates is compared. The findings agree with elasticity theory. Also, different growth kinetics are found on these two planes in terms of growth rate and preferential cation incorporation.

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