Abstract
An integrated microsystem is being developed which is able to handle the tight mechanical tolerances of monomode waveguide couplings by a controlled adjustment movement. It basically contains a two-axis microactuator for moving a fibre or a microlens, an optical sensor for the position detection, and a control circuit. Two types of microactuators, made completely by silicon micromachining, are investigated. The piezoelectric version contains a compliant mechanism with a two-stage hinge gear in order to enlarge the movement range. The electromagnetic system consists of several planar coils enabling bi-directional actuation. Both actuators easily cover an x - y displacement range of . As for position sensing, the most promising results are reached by detecting cladding modes resulting in a sharp signal minimum at the optimum position. The control algorithm is carried out by a microprocessor.
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