Abstract
R.f. sputtered Cr/Au films on alumina and sapphire substrates were subjected to thermal annealing treatments at 300 and 450 °C in vacuum and in air. These specimens were studied using Auger depth profiling and by measuring their sheet resistances. These results were analyzed and the Cr-Au interactions are described. At 300°C a grain boundary diffusion coefficient of 4X10 −15 cm 2s −1 for chromium in gold is derived.
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