Abstract
A high resolution study of the optical emission from nitrogen-plasmas produced by an Oxford Applied Research radio frequency plasma source is reported. Strong atomic emission lines in the near-infrared spectral region provide unequivocal evidence that the nitrogen-plasma source generates an appreciable flux of nitrogen atoms. Nitrogen atoms, rather than N 2 molecules in the plasma, are the most likely nitrogen-plasma species responsible for the successful p-type doping of ZnSe : N and related alloys. Emission spectra from the radio frequency nitrogen-plasma source are compared with similar emission spectra obtained from an electron cyclotron resonance microwave nitrogen-plasma source.
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