Abstract
The surface morphologies of SrTiO3 substrates and YBa2Cu3O7-δ (YBCO) films have been investigated by atomic force microscopy. Periodic step arrays could be developed on both normal and vicinal SrTiO3 (100) substrates by a new method employed both buffered NH4F-HF (BHF) solution and O2 annealing. This new method enables us obtain atomically regulated epitaxy of oxides. YBCO thin films grown on such terraced vicinal substrates exhibited terraces and steps few unit cells in height aligned in one direction.
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